University - National Laboratory Collaboration on MEMS Design Education

The paper describes the FAMU-FSU College of Engineering approach in educating graduate students in MEMS technology. The approach is based on a collaboration project between the Florida Agricultural and Mechanical University - Florida State University College of Engineering (FAMU-FSU COE) and Sandia National Laboratories (SNL). The project aims at developing a line of electrostatically and magnetically actuated surface micromachined pumps. The paper describes our experience in this collaboration program and illustrates the educational aspects of SNL MEMS design tools. The paper also describes the micropump designs developed in the first phase of the project. The pumps are being fabricated at this time. Results related to performance will be presented at a later time. However, an overview of the work to be done in the next phase is also presented.