Abstract
Piezoelectric materials have a strong interaction between their mechanical and electrical properties that translates into innovative components and circuits architectures. This work describes an original method using the electromechanical properties of the aluminum nitride (AlN) piezoelectric material to characterize its vertical extension when an electric field is applied. The novel techniques based on measurements of a planar parallel plate AlN capacitor without and with bias employing an impedance analyzer. The parallel plate capacitor theory and piezoelectric material analysis are used to calculate the vertical displacement of the AlN film.
| Original language | English |
|---|---|
| Pages (from-to) | 5-9 |
| Number of pages | 5 |
| Journal | International Journal of Microwave and Wireless Technologies |
| Volume | 1 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - Feb 2009 |
| Externally published | Yes |
Keywords
- Aluminum nitride
- Characterizations
- Material parameters
- Piezoelectric material
ASJC Scopus subject areas
- Electrical and Electronic Engineering