Abstract
This letter reports low-field wide-tunable interdigitated barium strontium titanate (BST) capacitors. The capacitors consisting of BST thin film dielectric, silicon substrate, and gold metallization have been fabricated. The capacitance exhibits 0.2 pF at zero-bias and shows a tunability of 63 % with an applied electric field of 1.4 V / μm. This corresponds to a 3.5 μm electrode gap width and a 5 V dc bias. Microwave measurements reveal a zero bias film quality of 50 around 30 GHz.
Original language | English |
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Pages (from-to) | 769-771 |
Number of pages | 3 |
Journal | IEEE Microwave and Wireless Components Letters |
Volume | 17 |
Issue number | 11 |
DOIs | |
Publication status | Published - Nov 2007 |
Externally published | Yes |
Keywords
- Barium strontium titanate (BST)
- Capacitors
- Thin film
- Tunable circuit
- Varactors
ASJC Scopus subject areas
- Condensed Matter Physics
- Electrical and Electronic Engineering