Wide-tunable low-field interdigitated barium strontium titanate capacitors

Mahmoud Al Ahmad; Magali Brunet; Sandrine Payan; Dominique Michau; Mario Maglione; Robert Plana

doi:10.1109/LMWC.2007.908044

Wide-tunable low-field interdigitated barium strontium titanate capacitors

Mahmoud Al Ahmad, Magali Brunet, Sandrine Payan, Dominique Michau, Mario Maglione, Robert Plana

Research output: Contribution to journal › Article › peer-review

25 Citations (Scopus)

Abstract

This letter reports low-field wide-tunable interdigitated barium strontium titanate (BST) capacitors. The capacitors consisting of BST thin film dielectric, silicon substrate, and gold metallization have been fabricated. The capacitance exhibits 0.2 pF at zero-bias and shows a tunability of 63 % with an applied electric field of 1.4 V / μm. This corresponds to a 3.5 μm electrode gap width and a 5 V dc bias. Microwave measurements reveal a zero bias film quality of 50 around 30 GHz.

Original language	English
Pages (from-to)	769-771
Number of pages	3
Journal	IEEE Microwave and Wireless Components Letters
Volume	17
Issue number	11
DOIs	https://doi.org/10.1109/LMWC.2007.908044
Publication status	Published - Nov 2007
Externally published	Yes

Keywords

Barium strontium titanate (BST)
Capacitors
Thin film
Tunable circuit
Varactors

ASJC Scopus subject areas

Condensed Matter Physics
Electrical and Electronic Engineering

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10.1109/LMWC.2007.908044

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title = "Wide-tunable low-field interdigitated barium strontium titanate capacitors",

abstract = "This letter reports low-field wide-tunable interdigitated barium strontium titanate (BST) capacitors. The capacitors consisting of BST thin film dielectric, silicon substrate, and gold metallization have been fabricated. The capacitance exhibits 0.2 pF at zero-bias and shows a tunability of 63 % with an applied electric field of 1.4 V / μm. This corresponds to a 3.5 μm electrode gap width and a 5 V dc bias. Microwave measurements reveal a zero bias film quality of 50 around 30 GHz.",

keywords = "Barium strontium titanate (BST), Capacitors, Thin film, Tunable circuit, Varactors",

author = "{Al Ahmad}, Mahmoud and Magali Brunet and Sandrine Payan and Dominique Michau and Mario Maglione and Robert Plana",

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AU - Al Ahmad, Mahmoud

AU - Brunet, Magali

AU - Payan, Sandrine

AU - Michau, Dominique

AU - Maglione, Mario

AU - Plana, Robert

PY - 2007/11

Y1 - 2007/11

N2 - This letter reports low-field wide-tunable interdigitated barium strontium titanate (BST) capacitors. The capacitors consisting of BST thin film dielectric, silicon substrate, and gold metallization have been fabricated. The capacitance exhibits 0.2 pF at zero-bias and shows a tunability of 63 % with an applied electric field of 1.4 V / μm. This corresponds to a 3.5 μm electrode gap width and a 5 V dc bias. Microwave measurements reveal a zero bias film quality of 50 around 30 GHz.

AB - This letter reports low-field wide-tunable interdigitated barium strontium titanate (BST) capacitors. The capacitors consisting of BST thin film dielectric, silicon substrate, and gold metallization have been fabricated. The capacitance exhibits 0.2 pF at zero-bias and shows a tunability of 63 % with an applied electric field of 1.4 V / μm. This corresponds to a 3.5 μm electrode gap width and a 5 V dc bias. Microwave measurements reveal a zero bias film quality of 50 around 30 GHz.

KW - Barium strontium titanate (BST)

KW - Capacitors

KW - Thin film

KW - Tunable circuit

KW - Varactors

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Wide-tunable low-field interdigitated barium strontium titanate capacitors

Abstract

Keywords

ASJC Scopus subject areas

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