Wide-tunable low-field interdigitated barium strontium titanate capacitors

Mahmoud Al Ahmad, Magali Brunet, Sandrine Payan, Dominique Michau, Mario Maglione, Robert Plana

Research output: Contribution to journalArticlepeer-review

25 Citations (Scopus)


This letter reports low-field wide-tunable interdigitated barium strontium titanate (BST) capacitors. The capacitors consisting of BST thin film dielectric, silicon substrate, and gold metallization have been fabricated. The capacitance exhibits 0.2 pF at zero-bias and shows a tunability of 63 % with an applied electric field of 1.4 V / μm. This corresponds to a 3.5 μm electrode gap width and a 5 V dc bias. Microwave measurements reveal a zero bias film quality of 50 around 30 GHz.

Original languageEnglish
Pages (from-to)769-771
Number of pages3
JournalIEEE Microwave and Wireless Components Letters
Issue number11
Publication statusPublished - Nov 2007
Externally publishedYes


  • Barium strontium titanate (BST)
  • Capacitors
  • Thin film
  • Tunable circuit
  • Varactors

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering


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